Summary. The Arizona Board of Regents (ABOR), on behalf of the University of Arizona, is soliciting Bids from interested vendors to furnish the University with an electron beam evaporation system. The intended coverage of this RFB and any Agreement resulting from this solicitation shall be for the use of all Departments at the University of Arizona. The other State Universities, Arizona State University (ASU) and Northern Arizona University (NAU), along with Pima Community College (PCC) and any other educational institution or Governmental entity may access an Agreement resulting from this solicitation issued and administered by the University of Arizona. 09/08/2023 Technical Questions/Inquiries due no later than 12:00 PM, MST System frame can be open or closed, but there must be easy access to all components of the system for the purpose of maintenance, repair and replacement. 5.1.2 The minimum inside chamber dimensions must be 380mm wide x 415mm deep x 600 mm high. 5.1.3 The chamber must include a viewport with a mechanism to prevent deposition on the window, or replaceable viewport protectors 5.1.4 The chamber must include multiple 2-3/4" spare CF ports (min 5) for expandability. Minimum of 2 ports are expected in locations that are conducive to incorporating RF/DC sputtering guns. 5.1.5 High Vacuum pumping system must be able to reach The system must include a film thickness monitoring system, programmable via software, with a minimum of 2 crystal sensors with shutter to cover one sensor and the ability to switch sensors during processing in the case that one sensor fails. 5.1.9 The system should include ion assisted deposition option that is controllable via software recipe 5.1.10 Substrate fixture must accommodate 8" wafers down to multiple oddly shaped pieces. The substrate fixture must include the mechanism by which to hold multiple sized substrates (clamps, tabs, wires, etc). 5.1.11 The substrate stage must have variable speed rotation 5.1.12 The substrate stage must be temperature controlled from no temp to 350C. 5.1.13 The substrate fixture must have height adjustment ability with automatic tooling factor adjustment in the software. 5.1.14 The source must have an automatic shutter controlled via software for precise deposition thickness control 5.1.15 Although this system for bid does not require a load lock, expandability to include a load lock at a later date is required. 5.1.16 Shipping and installation must be included in the bid. 5.1.17 1 Year Parts and Service Warranty must also be included in the bid.
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